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Characterization of Thin Film Boron Nitride Coatings and Observation of Graphite-Like Boron Nitride

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Academic year: 2021

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Fig. 1. (a) Schematic of the closed field unbalanced magnetron sputtering system, (b) BN growth layers.
Fig. 3. Raman spectra of BN layer grown on Si substrate. The red curve indicates the Lorentzian peak fitting.
Fig. 4. SEM images of BN/Si: (a) c-BN crystal, (b) and (c) examples of surface defects peeled off from the surface

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