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A new signal detection method for capacitive micromachined ultrasonic transducers

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Figure  2.7:  The  normalized  sensitivity  as  a function  of the  phase  difference  between  the  two  arms  of the  interferometer.
Figure  4.5:  The  calculated  sensitivity  as  a  function  of capacitor  width,  wc-
Figure  4.8:  The  calculated  sensitivity  as  a  function  of capacitor  length,  Ic-
Figure  4.9:  The  calculated  sensitivity  as  a  function  of bridge  height,  xo-
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