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Single nanoparticle sensing with nanoelectromechanical resonators operating at nonlinear regime

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Figure 1.1: A single nanoparticle landing on a nanomechanical resonator causes a frequency shift at the resonance frequency
Figure 2.1: Fabrication steps of the doubly clamped beam nanomechanical res- res-onators.
Figure 2.2: (a) In our design, one chip has 9 devices in variety of lengths. (b) 1 device has 5 contact pads that are used for actuation and detection of the  reso-nance motion
Figure 2.3: Transduction scheme of the NEMS resonator. Actuation and detec- detec-tion of the modetec-tion are obtained by the transducers which convert the mechanical motion to electrical signal and vica versa.
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