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~ .ı.\ C ı

re

n 13 i I i n 1 1 c r i En s t i t üs ü Der g i s i 9 .

c

:

i I t. 1 . Sa\· ı 2 O() 5

~ . ZnC r2O-ı 'in Neı11 ı\lgilaıı1n Davraıı i ~iııin 1( 2(.'r() 1 Eklenerek C3eliştirilnıl!sİ. . l~u\ aS().... §lu

"'

ZnCr

2

O.t 'in NEM ALGILAMA

DAVRANIŞININ

K

2

CrO.t EKLENEREK

GELİŞTİRİLMESİ

N.

K~ı\

V ASü('"'; L

l

J

1 ,

M. BA YHAN

2

,

S.

KAV

ASOĞ

L l

J

1

1

1-lacetteıJe Uııiv., Mi.ilı. Fak., Fizik Mülı. B ö lüıııü, Beytepe, Ankara

M Lığ 1 ~1 U 11 i v . , Fen E d e L1 . , Fal< . ,

r

i z

i

k B ö I i.i 111 i.i • l( öte I< l i , M u ğ I a , T e l : 2 5 2 2 1 1 1 5 9 2 , E-ın a i 1 : 111 l1 a lı a n@ 111 u . e d u . t r

~

-••

OZET

S J) i ııe I Zn Cr ~ O -1 sera 111 iğ i ne çeş itli y•i.izdese I oraıı !arda potasyLı 111 kro ıııa t I a )ıap ı l,lıı katkı I a ııd ı r111a n ı n ne nıe karş ı

da\1raııış ı ile ilgili etl, il eri çalı~ılııı ıştır. NüıııLıııeler aras1ııda sadece 0/420 1(

2

Cr0..ı içeren ZnCr

2

0

~

1 seranıik sensörün

0

o7 5 ile 9() ara~ıııda değişe n göreli ııeııı (Rf--l) aralığıııdak i cf .L~. direnci. üç nıertebe değişiııı göstereıı üstel bir

davra11 1ş serg il e ıııiştir. Yük ileti111iniıı c~ ase rı protonik oldLığu ve il etiıııin tane yüzcy lcrincie soğurtı lan ince su tab~ık,ı ları a ra~ ırıdaıı 111ctal ko nt,ıklara d oğru )'ap ılaıı )1ük transfer i ile koı1trl1l edi l(i iğ i so ııuctıııa arılnı ı~tır. cı.L· .

eıııı1elian s ö lçüııı so ııtıç ları ı şı ğ ıııc.la RC paralel de re ine seri bağ lı sal1 it faz e lcnıaıı larııı d· ın c1 ltı şan lıir devre sen (ir

e~cJ cğer c.ic\'rc~ i t> larak t)ııcrilnıektedir.

A ııal1tar l<.cli111clcr - Ncııı scnsörü~ ZııCr .O .-l( __ CrO.ı Eıııpcdaııs spektrosk o ıJ is i

.,

-IMPROVEMEN

T OF

THE HUMIDITY-SENSING

BERA VIOUR

OF ZnCr

2

0_. BY ADDITION OF K

2

CrO ...

ABSTRACT

·rııc cffccts or thc acid iti o ıı ot~ varioLıs J)erceııtages of JJotass iuııı c lıro ııı c1te as ,1 s interiııg c1id c111 tlıe response tc1 air

nı t) İsttıre

o

r

ZnCr~O I spiııel cerarn ic body were studied . Only· tlıe ıııaterial con tai ııing 2()~ o K2Cr0..ı- in ZnCr"'O~

ex lıilıi tcd aıı eXJJC.)rıential l,ehaviour to hL1111idity, which sl1ows abo ut tlıree order clıange iıı the cl.L· . resi tance c)ver

thc rclati vc lıu ıı1idity (

RH)

raı1ge betvveen 25 and

90~

10. it was conc lLıded tlıat co ı1duct i oıı is dtıe ıııainl)' to protonic

tı1<) li o n and is co ııtrolled through the ttıiıı layers of' \Vater, adso rbcd oıı tlıe surface ot· the gra iııs. wittı charge trarıs fer

to tlıc nıct,1llic clectrodes. Based 0 11

a.c.

impedance ı11easurements, an eqtıiva lent c ircLıit assoc iated \Vİ th a network of RC J)arallel circ Lıit in series \Vİtlı constant plıase e lcınents (CPEs) lıa beeıı sLıggested.

Keywords

-

Huınidity sensors, ZnCr

2

0ı.ı-K~Cr0

4

, lınpedance spectroscopy

(2)

S. C' I'en Bitin1leri En~titüsü Dergisi <).C'ilt. '·· a) ı 1 005

1. INTRODUCTION

The ... growing ' - deınand for the ın easureınent a11d co ııtro l of

hunı id it., v in an iı1dLıstrial or hoLısehold enviroııııı ent lıas led to co ıısiderable interest in tlıe researclı devoted to the de e lo pnıeııt of ne~, ınaterials for huıııidity seııso rs [ 1,2].

T he re I ati ve hum i d it y (

R H

) ,

\ıV h i c lı is t he r at i o of a c t Lt al

,,aJJ0 ur pressure ata particular tenıpcrature, is cc.)111ıno ı1ly

u. eci to ı11easLıre hLııııidity. Coınnıerc ia lly dcve lo ı)ed ~en sor 111ateria Is a re e itlıer po ly111cric or poro u ce raın ic, each ot· \vhich lı ave its O\Vn ııı erits aııd prov ide a direct clcctric signal ... asa fLınctioıı of lıtııııidit1' iıı the atnıo - phere. Ceranıic t)·pe of hun1idit)' seııso rs based on

. intered ox ilies via so lid state reac ti o ııs are iıı general su J)e r i o r i 11 perf o rıı1a ııce to rJ<.) ly nı eri c types, d ue to tlıe i r

hi ~ oh tlı er11ıal stal, ilit , arıd 11ı eclıanica l stre ıı~ trtlı to\vards a ,, itic raııge of OJ)cratiıı g tenıpcraturcs, fa. t res r,o rıse to

thc c lıa ııges ot' lıLı ıııidity, resistance to contaıı1iııaııts and i rrad iati o ıı and tlıe ease witlı \Vhich it ınay be prodLıced in thin filııı forııı

r

3].

f-Iowever , they are to a ce rtaiıı extent 11ot fully satisfactory iıı terıııs ot'

th

e

need for periodic

tl1crı11a l cyc liııg to recover tl1eir lıuıııi dity-seıısitive properti es. Iıı receııt years, nanostrLıctLıred ceraıııic fi lıııs ha c l1ee ıı id e ııtified as a o ptinıa l c,ındidates to r lıLııııidity

s

c

n

s

i rı g d Lı

e

t

o

t lı

e

11 i g lı

s

ur

fa

c

e a

r

e a e x

pos

e

d f

o

r

ad orptioıı of' water ın o lec Lıles l4] .

·rııe priııcip le ot' lıu ıııid it ıııeasurenıeııt is the variations i rı t lıe e lectrica I cond Lıction and capacitance due to water

cheıııisorptioııs aııd/or capillary water co ndLıctio n with in the pores [5.6J . Wheıı adsorJ)ti o ıı starts 011 the clean oxide sLırface, a la., er of lı)1drox I groups is forn1ed. Te

,vater apour ıııo lec Lıles are clıe ıııi sorbed tlıroLıgh a dis ·ociati

e

nıeclıaııi sı11 by· ,,vhicl1 t\ o surface 11:droxy·ls

per \\·ater ıııo lecLıl e are fo rnıed . Th i la)'er, once forı11ed

is not furt her ,rftectecl by ex1Jc.1sure to hL1111idity. Oııce the

tırst layer is l<.1rıııed, subseq u eııt layers of \Vater

ıııo lccLıl es are plıys ical ly adsorbed . Many 111ore

phy isorbed layers will be joiııed as l1tııııidity gets

lıi glıer . Tlıese pl1ys isorbed layers are easi ly aııd

'

-revers i b ly re ııı oved by decreas iıı g the hLıınidity.

Plıys i so rbed water ıııo lecu les dissociate, becaLıse of the

tı i ~ o lı e le c tr i c fi e I d s i ıı tlı e c lı e 111 is o r be d w ate r la yer. T he

charge trarı spo rt occurs wlıe n hyd roııiurıı ioıı s release a proton to neiglıboLıring water nıo lecules, wh iclı accepts it

wlı ile re leasi11g aııotlıer proton and so on (G rot11ıuss's

chai n reactio rı). ,~ı, is proto ıı 111oves freely along the water laycr aııd tlıLıs cieterıııiııes the sensor conductivity [7] . Finallv. at hi glı lıLııııidity, liquid water co ııdenses iıı the

capill; r)' po~·es.

acc

o

rdiıı

g

to

K

e

l

viıı's

la\v. and electrolytic coııdLıcti on occurs siınultaneoLıs ly 'A' İth

protoni c transı)ort.

Materials based 0 11 zinc chron1ite, as aı1 exaıııı) lc ofa ternar .. ıııetal ox ide piııel lıa e loı1g been id e ntifıed asa

canclidate to r aıı acti e 111ate rial in che ıııical se1ıs i11g

app lications f 8,9] . Ho\vever air ıno istLıre serı siti ve

2

Z ıı ( ' r 2 ( )-t 'in "\ c 111 .Alg i I a 111 a f) a, ra n i ~in ı n 1, ( r( ) :

Eklenerek (ıcli~Liriln1c ·i. "\. l,a, a~c)plu

ceraınic seııso rs based on pLıre zinc clıronıitc arc

ratlıer poor iıı perforı11arıce aııd a a re ·ult

co ınpos ites with TiO2 or LiZnVO-ı ha c been studied iııstead [ 1

O]

.

Ad ditionally, cer,ııııi c

coıııposites coııta inin g l( ~CrO_1 or ZnO in z iııc

chro ın ite Jıave bee ıı suggestcd as cand idate

ınaterial s tor hLıııı idity sc rıs iııg [ l 1, 12]. in tlıi s article, the response to relative huın idit)' (R//) ot' porous ceraıııics \Vith co ıı1pc1s itio11 Zn(~r:O

~-K,CrO4 prepared b)1 S()lid stcıte reaction at

elevated teıııpcratures. \\'as stu(i icd.

2. EXPERJM ENTAl.ı PROCE DURI~

Higlıest jJLı rity co ıı1 111 erciall~>' ava ilal1lc po\,vdcrs of

ZrıO aııd Cr O . ~1ere useci tıs J)rectırso rs. l ntinıate

ıııixtLıre of ZııO:Cr .O. \V İtl1

a

ıııo lar ratio of 1: 1

- '

was crLıshed iıı an agate pestle arıd ıııortar fo r 30

ıııiıı . fo llowed by calc iııati o n at teınperatures

ranging betweeıı 800 aııd I l OOl1C witlı a heatirıg rate of 500')C ıı-' iıı a ıııtıfflc fLırııace (Carl1o lite

R WF 12/5 ). Ttıe coıııp()Sitioıı and tlıe plıase \Vere

assessed by X-ray diffractio n (Jatterı1s ( himadztı

XRD-600 diffractoıııeter e111ploying a Cu target with iro n-fı ltered rad iat ioıı of wave length

1.54 18A).

The seııso r rnatcrials \\1erc fab ricated by adding in

various pcrcentages (l1y wc igl1t) of potassİLını

chroınate ( I<. ,CrO.ı) to the ZııCr,O

.

rflıe nıixtLıre

- 1

vvas gro uııd fc)r 30 ıııin ancı co ııııJacted into pellets

( \ı\' it lı a 1 3 111111 i n d i a ııı

c

t

c

r a ıı d l -3 111 m i n t h i c k)

'

at a pressure <.)f 1-2 toıı~ c ııı , wlıi c lı \,vere then

fireci at a te ınpcrate (1 f 1 1 ()()' C to r abo Lıt 12 hours.

The sLırface aııd fractured 111orpl1ologies of tlıe

pel lets were ob erved l1y scanı1 ing electron ınicroscopy (Jeol JSM IC848). Eleı11eııtal species

present iıı tlı t; pellets \Vere also analysed u s iııg

eııergy d ispersive aııalys is l1y X-rays ( ED X).

Tlıe d.c. resistance as a fLıııction of relative

lıuıııidity ııı easure ıııe ııts were carried oLıt using

two po iııt probe techııiqLıe. To this purpose, a

l(eithley-236 source and ıııeasure tınit was Lısed .

Tlıe sanıp les wcre iıı iti al ly 111 oLıııted in a custoın

btı ilt clı a ıııbcr, wlıere tlıe l1Lıınidity was controlled

by pass i ng a carrier gas throLıgh water at J)re(i eterıııiııed rates. The relative l1L111ıidity in tlıe cl1an1ber was ıııo nito re(I Lıs in... g a Testo 625

refereııce l1L1111idity ın etcr . Mctallic contact were

nı ade t'ro nı ga lliuııı \Vhic lı was fotınd to give

O lı 111 i c be lı a \1 i o ur . T h e cı. c . i ııı p e d a n c e

nı eas ureııı ents \ ere perforıııed Lısiııg a He,,,ıett

(3)

s ,.\(·ı F'cıı B i linıl e ri Enstitü_ rı D r~ 2:i. i 9.C ilt. 2 . Sa,~ ·ı ?00 ~

rre lıLıenc range bet\ e ıı 5Hz- l "MJ-lz tı ı . llb an

c. citatio n sigı1al of <50 111V aıııpl itu de.

3. RESUL TS AN D DISCUSSION

,,, l t !1 o Lı g h t he d i

tr

r

a c ti ıı p e a I at 2 O u ( (J 11 : B r a g g

1 \ 1 f 1 0 c '' 1 '1 9' "7 ~ ı• 4J-ı _ 5 ''_ 54.011

• <;7_5''_

ı ı ı ı .~ . e I a 11 g es L) _) . _ı • J _ . . -' . , _ . _ . _ 7

;.r:1,i 63 .2' ()l1tain ed fro n1 tlıc rJ owd r of ?Z11O : 1 Cr,O,

.. ~!ter fi ri 11g <it te ıı1ı)c ratLıres l1et\v~e n 80()- 1 l00''C lor

:·' ,J1 12 hoLırs are 21sSl)C İ c1ted with corre IJ nd iııg r1l aııes

· • --:-n C r 2 O -1 • t lı e JJ e ,l k s a t 2 f) 11 a n g I s o t· 3 4 . 5 l' 4 7 . 7' ·,

·. , 68. 1 '', 69 .21

' are as ociat d witl1 ZııO and tlıe peal<

.• ang le of., 1.9" w itlı Cr2O,. Tlıese re ults iııdi cated

tespite th e stoicl1İl) 111ctri ratio cl10 eı1 to p rod Lıce a

con1J)ou11d 01· Zı1Cr.:O .. , tlı c for111atio ı1 of Zı1C r2O ..

rıt gone to co ı111Jlet i o ıı tlı r idLı a l ot' botlı ZnO

, , which ,1re videıı t iıı th X-ray patte rns. - .

~ ı;;e 1 ~ , the B rag(J ~Je,ıl< · i rı th

X-

r

a

diffracto ııı t r

r O. fı red at 800 -,1 0 111 tlı po,\.ıd r of 1 n :1 - ' at ,fJ11 ").., 9 1 (I - _) . , 1 f- ı 8 .., ,, ,

o , -,

,,

-,

5 74° , 7 .., 8° aıı-. ... es c.) <. J , J _ _)_) .J . _) . .J 57.4711 , 6, .1 2' 1 , 7l. 63 '\ ,1nd 74.70° ali

ond to plzıııe s )!' Zrı r.0 1 iıııpl y iııg the fo rııı ation

·nl) ntı phasc cLıbi c b<.1d)· (. ee F' i sLıre 1 ). T l1e Miller

a rı d the Brc1g6 JJeal rat ios esti111ated a ı-e iıı detail

· d I wh 're

l

13

l.

Tl1c l::1ttice co ıı stant, an

d

fro

n1

::ızıclı d iffı·acti o n

p

e

a

l

< wa

s

J

Jl

o

tted

aga

in

st

) ,· siı1 () ( not slıL)W tı lı re) aı1d tl1e extrapolatio n of

. ta to ()

=

TT / 2 y i e ld d tlıe I attice coııstaııt as

ı, [14] .

2 sho,;y tyJJi cal s coııdary electro11 m icrograplı

he a -fir d . tırface

o

Z11Cr20.ı- l(2CrO.ı (20% ) fireci at 1 0l)01 \C fo r aboL1t 12 h oLırs. Tlı e ceraınic I porou nd a C' oreat • 111 l13tllf 11u ıııb er w ith of a grain size about

1-po

r

es,

i.nd icative of'

zatio11 ot· o ııe or ınore of tlıe coıı11Jo nents

)

1.,

p ta · iuııı) at lı igJ1 t ınp ratLı res .

Mo

r

eove

r

,

ç,caıı o\ıer tlıe r D o-i ıı

ot'

D ara iıı aı1d ~ crrai11

1r i re aled tl1at potassiLıın coııtent of graiıı

·.l·ır ie \~a si gııi fica ntJy l1igl1er a coıııpa red ta that

\; .... erain as i · slıc \ n iıı tlı Fi~L~ ıre 3.

-

....

(/) C :::::ı Q.) > ·

....

-('O

-

Q.) ı... C

----(/) C QJ ... C

ZnCr2()• 'in Ne nı A l gila n1 ,ı Da rani ş iııi ıı l(~( 'r()_~

Eklenerek Ge !i ~tirihııes i , . l(avaso ğ lu

• 1Zn0:1Cr 2 O 3

-•

-

1100°C '-

,

& l ı

.

.. , l ' i •• • 1 '- - ... l .. ... • 1 • • . ~ .

-

, • 800°C LI -ı ] - ı_ - ·ı -__..__ --~ ..l....~-7 • ( 111 ) (220)(31 1) (400) (422) (511 ~440)(620)(533) . 1 . ' . 1 -' . ' . ' . ' -' . o 1 O 20 30 40 50 60 70 80 90 Figure 1. X- ray dill'raction patt crııs

or

IZn< - 1 'r,(J, po,\·dcr - ' () ubtaiıı ed alter fi rin~ g in thc ran~ ec 800- 1 100 C' ror about 12 lıour, in air.

Figurc 2. Thc as-fired surlace secnndary electron nıicrograph

o

of ZnC'r, - K,

·

·ro

(2011/0) anıple sintered at l000

c

·

tor

- -

..

about 12 lı ours.

-

,.,,

-·-C: ~ QJ >

·

.,

-m

-

QJ L. C:

-~

z.

·

-

V) C: QJ

....

C:

o

K 50 Grain Pores Cr ~ . . • Zn 100 150 200 Energy ( eV)

Fi0 ure 3. Typical EDX pectra recorded froııı the pellet conta in ing 20% K~ rO ... in the in set the potass iuın peak i- re

(4)

..

.', l l Fen Bili111leri En ·titü Li D~rgi.'i 9.l-- ilt. 2 .. a,·ı 2

-F igLı re 4 slı ows d .c. re ista11ce as a fL111ct i on ot· r lati v

lıL1111 idi ty for ZnCr=O• - l( 2CrO-1 c raıııic y t e ııı ':lt variou

percent21ges of IJOtassİ Lllll c lıro ııı ate. rrh cl.c·. r İ ·tance

\ a a strong fLıııctioıı ot· tlı lıLırııidity for all

'O ıııpositiorı s, decrea iııg b v-ra l rd r f ıııagnitude

LqJ n iııcreasiııg hLııııidity al lıoLı ~ lı on ! nıat rial

c ııtairıir1g 20o/o K, rO di play d aıı xpon ntial belıaviotır as fuııction of

RH.

Thi i br adly coıısistent

\Vİth , hat is ııor111al '~' report d nd i geııeral ly

u rıderstood i 11 terıııs of th r uglı aıı d rb d \ at r plıase

[15 16]. Tlıe co nduction ın clıani 111 ııcluded froı11 tlı

e ideııce given abo e i ioııi and tlıat protoııs ar

p roba b 1 ' t lı do 111 in a ıı t c lı ar g ar r i r l 7] . A I e a t

-quare best fit to th alue ·

f

/.c·. re istaııce verstı

r lativ lıLııııidit for tlı aıııpl c o ntainiı1~ 20°/o l(~CrO

yi ld d lc>g(R) = l0.22 - 0.0 (Rl-f), (fı rR iııolıııısaDıd RH in o/o). 1 o 10 A • ...

..

ZnCr O :K CrO • 2 4 2 4 109 • •

..

..

...

-

C

-

..

-

Jı,.. eı:::

108 • •

..

- ~ a.ı . . . . . . . .

..

u . . . . . ••

..

C .. • . . ro . . +-' 107 • •• . . . ... . 1/) ı..

'

.

-1/) K CrO (10%) • ... • (l) ,

.

• • •

....

,.

. ı,_ • K1Cr0, (20%)

..

• . 106 K CrO (30%) u . ... 1 • •

....

"'O . . . Precursor 20 40 60 80 100 Relative humidity RH (%)

Figure -1. (/.c. re i.-ırınc -· ver·u · rı::l atiYc huıı1idit,~ · charactcri tic of

Z11 ·r_ 1- K::. ·ro -1 ceranıı c sy:ıeıı1 at var iou~ perccntages of potas iıııı1 c h ro nıa le.

111 aıı atteııııJt to in r a. e oııdLıcti it . Cu.O ,;vas added to

·0111 a nıp le CC)11tai ııiııg 2 · 0/ o J)Otas İLıırı chrc1111ate. he

corre poı1di ı1g l.c·. re ·i taııce v rsLı r lati\ıe lıu111idity

clıaracter i ·tic~· ar giv 11 in Fi!.!.ure 5 and ... revea] tlıat the

add iti 11 of LıÜ lıad draıııat ic effect 011 tlıe lıuıııidity

d pen lence. ~rıı add i t ion of oıı 1 1 '~1o CLı O red uced the resistaııce at low l1Lııııi d ity ( Rf-1 <40o/o) by ap proxiıııately

a ıı o r d r o f I11 a b n i t Lı d e. \V lı i I e at 11 i g lı e r h u ın i el i ty it

a1Jpcar d to lıav.e ııo t~ et. 1 ncrea in g tlıe !eve I of CLıÜ

doJ)İ11 6 n t on! red Lıced the low l1uı11idity resistance

ven 111 r it rev r d the slope of the clıaracteristic, so

th t for

RH

<40o/o r i taııce increased witlı i11creasi11g

lı u 111 i d i t . T lı r , ıı

f

o r t h is re ver sa I o

f

s I o p e ar e 11. ot at

pr 11t l r.

lıe arıatıon . .

f

th ıııagnittıde of iınpedaııce ( Z )

r LI fr qLl n - (

.

r

for th a111ple coı1taiııing 20%

K., r ( e F i O u re 6) u ıı der a d r

11

u 111 i d a ın b i en t s h o,

a

lıiglı

fr qu ney fail-aft' of Z as

f

-

o.&, \Vhic}1 is due

4

ZnCr20• 'in e nı . Igi lanıa Da,·rani; ini11 I(~ 'r( )

- h:.lenerck Gc li ti ril nıe~· i. . l<. a, u_·llQlu

ıııaiııly to capac ıtı ve effects '" itlıin tlı · 1:t 111

froııı cal,les tlı e equip ııı e ııt irır>ut capac itan c and

p lı. s i c a I g_e o ııı et r y

o

t

t h e c on t <1 c t ~ . t fr q u

e

n · i .

b ·low l

o

"

Hz, ıııagn i tLıd e ot- iıııp d n, \ ari ,

very ~ ıowl)1 \Vİtlı ./ · iııdi ~(ıtin g tlıat rc ·i ·tive-t. 'JJ

behav ior is n1ore cloııı i ıı aıı t. -r~h is typ of be h ·ı io r

is reported widely in s iınilar ceraıııic syst rrı

[18, 19]. Tlıe Col - Cole plot of coıııfJlex

1, "

i 111 p edan c e ( i . . ,

Z

v r us

Z

w here

Z

a 11 d

,

Z correspond to co ıııı) l e ✓ and r-al ıJart of the

i111pedaı1ce) i also di play d iıı tlı in t of FigLır

6. It consist

f

a d pr s d nıicircl

corresponding to 8 par, llel coınbi11ati n ofa cl.c· .

coı1d Lıctance arı d a · l i glıt l d i p r iv capac itance

togeth er \ itlı a so-call d p · Lıdo-iııdLıctaııc I p

[20]. 109 • 1% CuO • 2% Cu0 • 108 •

-

5%Cu0 C: •

-

eı::: • ~ ·ı '.J 1 D QJ C: o 107 u o C ll C: C'll rı ... ... ... ... 9'.-1 1/) Ll A

..

..

....

..

·-1/) ... ...

..

..

~

-(1) ı..ı ı... ... • 106 ... D • Ü ... • 'ti ... 1051---,1"""""'-T" __ ""'I""'"" _ _ ,..."""""' _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ . O 1 O 20 30 40 50 60 70 80 90 100 RH (%) J.~ i o u re S. , /. c. r · i .s t ı1 ıı c ı; r su re I at ive lı un 1 i el it\ (20°/4 ) ceran1ic systenı ch aracteri ·tic ol" the 7n r :'. O .J - K C~ rO at various pcrccntagı:s

o

r

'u(). 1Q5T""ffll ... ""l""l"l . . . . r"""""',._~'l'lll...,,.._ ...

l"l'II_."'"'_

-

... C N 104 10°

••••••

\ 1 1 1

••

• • • • • • • • • ı_ • ı_ 1 • 'ı . .ı.

-

., 1 -· f ı.10· · • •

-

• . 1 • N

• • . ~ • 1 • <ti h 10'" .. C . o, ıı:ı • E • V -G . n 2:ı 1•• ıh,,U ' ı;;.10· B'ıı:10· Re.al Z (U) 102 104 106 Frequency, f (Hz) 1

'

. 1 . 1 1 1

1 ' 108

l,i~urc (L A plot

o

r

Z ver. us frcquenc_; for the sanıple

nııtaining 20<1/o K :C' rO.ı undcr 22r1/ı> RH . in the in et Cnlc

-c·oıc plot I' th iıı1ped ·ııı e ıııeasurecl for tlıis sanıple i. also

(5)

~ .. \( ' ı ·cn Bilinılcri Cnstitüsü Dergisi 9.C'il t. 2.S,t) ı 2()05

,.\ lıoıııe-nıad e ZnC r_O :- l<._CrO.(1 0°0 ) ceranıic lıuııı icl ity

ı...cn.:;ı.1r \\a ' also satisfactoril)' cal ibratcd Ll ing a rcfereııce

J1Lıtııiciit) seıı ·or

S

HT

75

.

obtained frt) tıı .. · en s iri oıı . To

lhut c1iııı. a nt1vc l circu i1ry· Cl,ns isti ııg ofa 11 l1it A D.

s ı I 1·7) iııtc rfacc ci rcLıi t aııti I to V l1ri tlgc aıııı, lifi cr \:vas

Lit'\ ell)ped. rrlıc t);pical sanıı,ling rale () r de el()jJell ı\ 'D

circuit i~ alıl)Ut l () kl-17. aııd it works 0-5 V rangc \Vİtlı an

aı,ı1rL) \ İnıatcl 1 1.25 111V reso luti o ıı . ·1·1ıc c ircu it is

•~n1trt)llec.i l,\· a ()l1asic rl1 ut iııe t)tl tlıc l)(' \Vlıic h all <1\\ s to

-

-!LClU i re (.)tlC hu ııllrcd dat~l ~1er SCC()llCI. ·r•ııc

S

i rr

7:

i . a

1

-in~lc chi11 ıııulti se ııso r ııı ()dtılc iııc luclin g a ca ı)ac iti e

~

... l\111\~r , lıunıi(lity' sc ııs iııg c lc ıne llt aııtl a l1anli gap

_ , 1 11 ı.: r 8 t u r c ~ c il s o r .

4. CONC LUSION

ıı1cıı'ıtL1rc sensitive ZııCr C) , ccraııı ic l1t1dy jJ rodLıced

- -,

+h~ ~olid ~lale rcnctio11 lJCl\vccıı 1.inc c)x idc aııd

1ııl,~ L) :-<İdc at c lcvc_ltcd tt:ı1111cratu rcs cli sıJ la)·eci a

, 11 )t1r scıı~ iıı g 11erfc)r11ınncc tt1 lıLııııid it: . l l o \Ve\ıer.

~ı~taııct.' a~ a ftıııctioıı l1f rclati e huııı idity slıO\\:ed g clc11cnlicncc, <.iccrcasing l) \1er se\'Cra l or(i ers 01·

udL \\ itl1 iı1c rca~i 11~ ._ lıtııııidi t\' l)ci n' -~ c.l s nıooth

~ 1 nli~ıl in thc ense t11· tlıe sanııı lc ı) reıJarccl using

ı) (.., ()0 o) iıı /nl"r () ,. 1·11e cıJ (Iİtİ c) n C) f ( .,u() rc sulted

İliC rL·~t"ıC 111 tlıc cc1 ıı c.lu cti\.ıit,· l,u t lıuti a tie leteric)us

r

·Ll ()11 tlıc lıu ıııillİt\ . · ı he~~ rc~uıt ~ İn (l ic,1te Llıat

)

1,

( 'rt)

.

~., ,·~tc ıı1 c1 ıı cc calc iı1 ccl , c<.1 1111Jactc<.i aııd L'Ll uııdcr 11r()pcr t.:()11<.l it İ<1 11s ha · 1Jote11ti'11 Lıse as aıı

111tılcrinl lt)r tlıc· lıtııııiclit\-' scnsors.

ACKN OWLEDGEM~:NTS

ıu tlll)rs like tc) acl(tlC) \Vlcdge fiııan c ial SLIJ)port l1y tlıe

ı , ers ıı}· t)I' Muğla, Researc lı Project Fc)Ltn(iation (AF~P

ı

).

1 lı C \ . n r C t! r at C

r

LI I t o A .

w

.

B r i il k 111 a 11 f o r l1 e I p fı.ı l

.

'-.; e

til111s antl c.i i sc tıssioııs. Tlı ank.s are also dtıe to Ş .

1k lt)r lıi~ ct1ııtiı1tı0Lıs supp ort of tlıis \Vork.

5

ZnC 'r2C)-ı 'in 1c111 ,'\lgilan1a Oa,·rani ~inin l( :( 'r() 1

f-:klcncrek Cicli~tiriln1~si. . 1<.n, a~<)ğlu

REFERENCES

[ 1 ]. . Yaıııazoe and Y. Shiıııizu, Seııs. Actuators,

10 (]986) 379.

r2 ı. 11 . Arai aııcl ı-. Se İ)'31113, ''/fııı,, illiıJ · sel7S(>rs"

in W. Göpel. J. Hcsse and J . . Zcnıcl (l:ds. ),

".\·c] ı 7S(Jrs. ( '/1e 111 ic:cıl (t 11(/ /3 ı <Jc l7L' ııı iccı /

.';eı1S{Jr.v". VC"'l-f. We inhei nı. 1991 .

f3]. S. Aga,,al. G.L. S lıarıııa. ~· e11s. ı\ct uatt1rc.; B.

85 (~0()1 ) 1

0:.

[41 . W. P '"l'ai aııc.l J. H Oh. Tlıin Solicl r:ilnı _ 422

(2002) 21().

[5J. 8 . M. l(ul\vicki. J. Aıı1 . Ceranı. Soc .. 74 (4)

( l 99 1 ) 69 7.

[6] J. 1-lolc~ .l. Slı.ınecko , M. I-Irovat. , ells.

ActLıat<.1rs B, 26-27 ( 1995) 3 12.

l

7] . J . H . ıL\ ilde r s o 11 an d G . ı\ . l) ar I<, J . P h )'si c a 1 C lı e n1 i s t r y, 7 2 ( 1 O ) ( l 9 6 8 ) 3 6 6 2 . [ 8] .

w

Ll M i il g -

-

r

an g.

s

ll 11 1-1 () il g -, J 'a o a il d L., i J) i il g. Scı1s. ActLıato r B, 17 ( 1994) 9. [ 9] . X . Lı ıı . . W . J on es, J . C . G c i c k. L. X u an d G . W . R o bert s, ı\ JJ p I i e d C ata 1 )' s is A, 2 3 l ( 1 0()1) 269. fl()] . Y . Y l1k (11ııi zc). ·. U no. M . l-l arc1tc1 and H . 1 1 i r ak i . . c 11 s. c t u at o r . 4 ( 1 9 8 ~ ) 5 9 9 . 1 ı ı l . M .

r~

a 1 lı a il . ·

r

.

1-1 as 11 e nı i an d ı\ . W . f3 r i 11 k n ı an . .J . M at c r . S c i . , 3 2 ( 1 9 9 7 ) 6 6 1 9 .

1_ 12 J. : . f><.)kh rcl. 1-3 . .JeJ'araj. I . .' . agaraja.

M ate r . I J c t t . . 1 -() ( 2 l) () 3 ) 4 J 7 8 .

l

13 j. l(a\·asoğltı , Fııııc.·ı İ(Jt7lıl C e r(1111ic·

llııı,1i(litr . ,Çe,1srJrs. M.Sc. Thesis. Uni ersİt\ .,

of Mu ğla, 200 1.

'

-[ 14]. JCPDS ( lııte rııatio ııa l Ce ııtre ot· Diffraction

Data) C,tr<.I N o: 22- l l 07. 1996.

ı.ısı . G. rf ()Sl1l(O, P. Neı1 ov, D. Stefcho

a

nd

P.

Y o rclaııc1v, "( 'er(/}JlİC' .Seı?S()J'S 7ec/111(J/()s.,r:ı· Cl/1(1

ı1 /7 J7I ic·(t ı i cJ11s", 'Teclı no 111 i c Pu lJ I islı i ng

Co 111 ~Jany, Penıısy lavan ia, 1 996.

f

16]. E. McC~a·fferty aııd A. C. Zettleınoyer.

Di ctı . [;arada

1

1 Soc., 52 ( 1971)

239

.

1_1 7]. P. I<ııautlı, J. E lectroceraıııics, 5 (2) (2000)

l l 1 .

r 181 . M. J. l logan. A. W. Briııknıan aııd T .

l-l ,1 lıcıııi, A~JJJI. Phy . Lett. 72 ( 19()8) 3077.

11

9

1

.

K. Vija)1aıı1o lıana ıı. G. Patl1ak. M. P. Vino(i.

S. S. J)in ~a lc aı1d S. F. Patil, Mater. C'hen1.

--P lı

ys.

,

46 ( 1996) 72.

[ 2 O ] . A . K . J

o

s

c

he r,

D

i e

I

e c t r i c·

R

e

/

cı.Y cı l i c) ı 1 i 11

.

'

,c>li(

/

s

(Chelsea Dielectric Pres , Londotı

Şekil

Figure  -1.  ( / . c .  re  i . - ı rı n c - ·  v e r · u  ·  rı::l a tiYc  huıı1idit, ~  ·  charactcri  tic  o f

Referanslar

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